An experimental investigation into micro ball end-milling of silicon

10.1016/j.jmapro.2011.09.004

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Bibliographic Details
Main Authors:	Arif, M., Rahman, M., San, W.Y.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	CBN tool Micro ball end-milling Micromachining Silicon Silicon micromachining
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/84863
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-84863
record_format	dspace
spelling	sg-nus-scholar.10635-848632015-01-16T05:08:09Z An experimental investigation into micro ball end-milling of silicon Arif, M. Rahman, M. San, W.Y. MECHANICAL ENGINEERING CBN tool Micro ball end-milling Micromachining Silicon Silicon micromachining 10.1016/j.jmapro.2011.09.004 Journal of Manufacturing Processes 14 1 52-61 2014-10-07T09:01:10Z 2014-10-07T09:01:10Z 2012-01 Article Arif, M.,Rahman, M.,San, W.Y. (2012-01). An experimental investigation into micro ball end-milling of silicon. Journal of Manufacturing Processes 14 (1) : 52-61. ScholarBank@NUS Repository. <a href="https://doi.org/10.1016/j.jmapro.2011.09.004" target="_blank">https://doi.org/10.1016/j.jmapro.2011.09.004</a> 15266125 http://scholarbank.nus.edu.sg/handle/10635/84863 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	CBN tool Micro ball end-milling Micromachining Silicon Silicon micromachining
spellingShingle	CBN tool Micro ball end-milling Micromachining Silicon Silicon micromachining Arif, M. Rahman, M. San, W.Y. An experimental investigation into micro ball end-milling of silicon
description	10.1016/j.jmapro.2011.09.004
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Arif, M. Rahman, M. San, W.Y.
format	Article
author	Arif, M. Rahman, M. San, W.Y.
author_sort	Arif, M.
title	An experimental investigation into micro ball end-milling of silicon
title_short	An experimental investigation into micro ball end-milling of silicon
title_full	An experimental investigation into micro ball end-milling of silicon
title_fullStr	An experimental investigation into micro ball end-milling of silicon
title_full_unstemmed	An experimental investigation into micro ball end-milling of silicon
title_sort	experimental investigation into micro ball end-milling of silicon
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/84863
_version_	1681089696191479808

An experimental investigation into micro ball end-milling of silicon

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