Dynamic behavior of high-g mems accelerometer incorporated with novel micro flexures

Dynamic behavior of high-g mems accelerometer incorporated with novel micro flexures

10.1142/S0218194005002129

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Bibliographic Details
Main Authors: Chen, B., Miao, J., Lim, C., Tay, F.E.H., Iliescu, C.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Accelerometer
Flexure
Interlapped-L
Rectangular
Online Access:http://scholarbank.nus.edu.sg/handle/10635/85031
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/85031

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