Fabrication of a dielectrophoretic chip with 3D silicon electrodes
10.1088/0960-1317/15/3/009
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2014
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sg-nus-scholar.10635-851922023-10-31T20:13:27Z Fabrication of a dielectrophoretic chip with 3D silicon electrodes Iliescu, C. Xu, G.L. Samper, V. Tay, F.E.H. MECHANICAL ENGINEERING 10.1088/0960-1317/15/3/009 Journal of Micromechanics and Microengineering 15 3 494-500 JMMIE 2014-10-07T09:05:05Z 2014-10-07T09:05:05Z 2005-03 Article Iliescu, C., Xu, G.L., Samper, V., Tay, F.E.H. (2005-03). Fabrication of a dielectrophoretic chip with 3D silicon electrodes. Journal of Micromechanics and Microengineering 15 (3) : 494-500. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/15/3/009 09601317 http://scholarbank.nus.edu.sg/handle/10635/85192 000228917000009 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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ScholarBank@NUS |
| description |
10.1088/0960-1317/15/3/009 |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Iliescu, C. Xu, G.L. Samper, V. Tay, F.E.H. |
| format |
Article |
| author |
Iliescu, C. Xu, G.L. Samper, V. Tay, F.E.H. |
| spellingShingle |
Iliescu, C. Xu, G.L. Samper, V. Tay, F.E.H. Fabrication of a dielectrophoretic chip with 3D silicon electrodes |
| author_sort |
Iliescu, C. |
| title |
Fabrication of a dielectrophoretic chip with 3D silicon electrodes |
| title_short |
Fabrication of a dielectrophoretic chip with 3D silicon electrodes |
| title_full |
Fabrication of a dielectrophoretic chip with 3D silicon electrodes |
| title_fullStr |
Fabrication of a dielectrophoretic chip with 3D silicon electrodes |
| title_full_unstemmed |
Fabrication of a dielectrophoretic chip with 3D silicon electrodes |
| title_sort |
fabrication of a dielectrophoretic chip with 3d silicon electrodes |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/85192 |
| _version_ |
1781784614529925120 |