High resolution UV roll-to-roll nanoimprinting of resin moulds and subsequent replication via thermal nanoimprint lithography

High resolution UV roll-to-roll nanoimprinting of resin moulds and subsequent replication via thermal nanoimprint lithography

10.1088/0957-4484/23/48/485310

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Bibliographic Details
Main Authors: Dumond, J.J., Mahabadi, K.A., Yee, Y.S., Tan, C., Fuh, J.Y.H., Lee, H.P., Low, H.Y.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/85266
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/85266

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