Zhu, J., Yeap, K., Zeng, K., Lu, L., & ENGINEERING, M. (2014). Nanomechanical characterization of sputtered RuO2 thin film on silicon substrate for solid state electronic devices.
Chicago Style CitationZhu, J., K.B Yeap, K. Zeng, L. Lu, and MECHANICAL ENGINEERING. Nanomechanical Characterization of Sputtered RuO2 Thin Film On Silicon Substrate for Solid State Electronic Devices. 2014.
MLA CitationZhu, J., et al. Nanomechanical Characterization of Sputtered RuO2 Thin Film On Silicon Substrate for Solid State Electronic Devices. 2014.
Warning: These citations may not always be 100% accurate.