Nano-tribometer integrated with a nano-photonic displacement-sensing mechanism

10.1088/0960-1317/21/6/065014

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Main Authors: Yu, H., Zhou, G., Chew, X., Sinha, S.K., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/85471
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-854712023-10-31T20:02:42Z Nano-tribometer integrated with a nano-photonic displacement-sensing mechanism Yu, H. Zhou, G. Chew, X. Sinha, S.K. Chau, F.S. MECHANICAL ENGINEERING 10.1088/0960-1317/21/6/065014 Journal of Micromechanics and Microengineering 21 6 - JMMIE 2014-10-07T09:08:24Z 2014-10-07T09:08:24Z 2011-06 Article Yu, H., Zhou, G., Chew, X., Sinha, S.K., Chau, F.S. (2011-06). Nano-tribometer integrated with a nano-photonic displacement-sensing mechanism. Journal of Micromechanics and Microengineering 21 (6) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/21/6/065014 09601317 http://scholarbank.nus.edu.sg/handle/10635/85471 000291021900014 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description 10.1088/0960-1317/21/6/065014
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Yu, H.
Zhou, G.
Chew, X.
Sinha, S.K.
Chau, F.S.
format Article
author Yu, H.
Zhou, G.
Chew, X.
Sinha, S.K.
Chau, F.S.
spellingShingle Yu, H.
Zhou, G.
Chew, X.
Sinha, S.K.
Chau, F.S.
Nano-tribometer integrated with a nano-photonic displacement-sensing mechanism
author_sort Yu, H.
title Nano-tribometer integrated with a nano-photonic displacement-sensing mechanism
title_short Nano-tribometer integrated with a nano-photonic displacement-sensing mechanism
title_full Nano-tribometer integrated with a nano-photonic displacement-sensing mechanism
title_fullStr Nano-tribometer integrated with a nano-photonic displacement-sensing mechanism
title_full_unstemmed Nano-tribometer integrated with a nano-photonic displacement-sensing mechanism
title_sort nano-tribometer integrated with a nano-photonic displacement-sensing mechanism
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/85471
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