Nano-tribometer integrated with a nano-photonic displacement-sensing mechanism
10.1088/0960-1317/21/6/065014
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sg-nus-scholar.10635-854712023-10-31T20:02:42Z Nano-tribometer integrated with a nano-photonic displacement-sensing mechanism Yu, H. Zhou, G. Chew, X. Sinha, S.K. Chau, F.S. MECHANICAL ENGINEERING 10.1088/0960-1317/21/6/065014 Journal of Micromechanics and Microengineering 21 6 - JMMIE 2014-10-07T09:08:24Z 2014-10-07T09:08:24Z 2011-06 Article Yu, H., Zhou, G., Chew, X., Sinha, S.K., Chau, F.S. (2011-06). Nano-tribometer integrated with a nano-photonic displacement-sensing mechanism. Journal of Micromechanics and Microengineering 21 (6) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/21/6/065014 09601317 http://scholarbank.nus.edu.sg/handle/10635/85471 000291021900014 Scopus |
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10.1088/0960-1317/21/6/065014 |
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MECHANICAL ENGINEERING |
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MECHANICAL ENGINEERING Yu, H. Zhou, G. Chew, X. Sinha, S.K. Chau, F.S. |
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Yu, H. Zhou, G. Chew, X. Sinha, S.K. Chau, F.S. |
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Yu, H. Zhou, G. Chew, X. Sinha, S.K. Chau, F.S. Nano-tribometer integrated with a nano-photonic displacement-sensing mechanism |
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Yu, H. |
title |
Nano-tribometer integrated with a nano-photonic displacement-sensing mechanism |
title_short |
Nano-tribometer integrated with a nano-photonic displacement-sensing mechanism |
title_full |
Nano-tribometer integrated with a nano-photonic displacement-sensing mechanism |
title_fullStr |
Nano-tribometer integrated with a nano-photonic displacement-sensing mechanism |
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Nano-tribometer integrated with a nano-photonic displacement-sensing mechanism |
title_sort |
nano-tribometer integrated with a nano-photonic displacement-sensing mechanism |
publishDate |
2014 |
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http://scholarbank.nus.edu.sg/handle/10635/85471 |
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1781784681777201152 |