Nanoindentation for quality control of ULK films

10.1109/IITC.2011.5940290

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Bibliographic Details
Main Authors:	Yeap, K.B., Zeng, K., Hangen, U., Zschech, E.
Other Authors:	MECHANICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/86034
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-86034
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spelling	sg-nus-scholar.10635-860342015-01-12T21:27:59Z Nanoindentation for quality control of ULK films Yeap, K.B. Zeng, K. Hangen, U. Zschech, E. MECHANICAL ENGINEERING 10.1109/IITC.2011.5940290 2011 IEEE International Interconnect Technology Conference and 2011 Materials for Advanced Metallization, IITC/MAM 2011 - 2014-10-07T09:15:07Z 2014-10-07T09:15:07Z 2011 Conference Paper Yeap, K.B.,Zeng, K.,Hangen, U.,Zschech, E. (2011). Nanoindentation for quality control of ULK films. 2011 IEEE International Interconnect Technology Conference and 2011 Materials for Advanced Metallization, IITC/MAM 2011 : -. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/IITC.2011.5940290" target="_blank">https://doi.org/10.1109/IITC.2011.5940290</a> 9781457705038 http://scholarbank.nus.edu.sg/handle/10635/86034 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	10.1109/IITC.2011.5940290
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Yeap, K.B. Zeng, K. Hangen, U. Zschech, E.
format	Conference or Workshop Item
author	Yeap, K.B. Zeng, K. Hangen, U. Zschech, E.
spellingShingle	Yeap, K.B. Zeng, K. Hangen, U. Zschech, E. Nanoindentation for quality control of ULK films
author_sort	Yeap, K.B.
title	Nanoindentation for quality control of ULK films
title_short	Nanoindentation for quality control of ULK films
title_full	Nanoindentation for quality control of ULK films
title_fullStr	Nanoindentation for quality control of ULK films
title_full_unstemmed	Nanoindentation for quality control of ULK films
title_sort	nanoindentation for quality control of ulk films
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/86034
_version_	1681089909718253568

Nanoindentation for quality control of ULK films

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