Preparation of (0 0 1)-oriented PZT thin films on silicon wafers using pulsed laser deposition

10.1016/S0022-0248(01)00865-X

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Bibliographic Details
Main Authors: Zhao, J., Lu, L., Thompson, C.V., Lu, Y.F., Song, W.D.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/86060
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-860602024-11-08T18:20:40Z Preparation of (0 0 1)-oriented PZT thin films on silicon wafers using pulsed laser deposition Zhao, J. Lu, L. Thompson, C.V. Lu, Y.F. Song, W.D. MECHANICAL ENGINEERING A3. Laser epitaxy A3. Pulsed laser deposition 10.1016/S0022-0248(01)00865-X Journal of Crystal Growth 225 2-4 173-177 JCRGA 2014-10-07T09:15:24Z 2014-10-07T09:15:24Z 2001-05 Conference Paper Zhao, J., Lu, L., Thompson, C.V., Lu, Y.F., Song, W.D. (2001-05). Preparation of (0 0 1)-oriented PZT thin films on silicon wafers using pulsed laser deposition. Journal of Crystal Growth 225 (2-4) : 173-177. ScholarBank@NUS Repository. https://doi.org/10.1016/S0022-0248(01)00865-X 00220248 http://scholarbank.nus.edu.sg/handle/10635/86060 000169394300015 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic A3. Laser epitaxy
A3. Pulsed laser deposition
spellingShingle A3. Laser epitaxy
A3. Pulsed laser deposition
Zhao, J.
Lu, L.
Thompson, C.V.
Lu, Y.F.
Song, W.D.
Preparation of (0 0 1)-oriented PZT thin films on silicon wafers using pulsed laser deposition
description 10.1016/S0022-0248(01)00865-X
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Zhao, J.
Lu, L.
Thompson, C.V.
Lu, Y.F.
Song, W.D.
format Conference or Workshop Item
author Zhao, J.
Lu, L.
Thompson, C.V.
Lu, Y.F.
Song, W.D.
author_sort Zhao, J.
title Preparation of (0 0 1)-oriented PZT thin films on silicon wafers using pulsed laser deposition
title_short Preparation of (0 0 1)-oriented PZT thin films on silicon wafers using pulsed laser deposition
title_full Preparation of (0 0 1)-oriented PZT thin films on silicon wafers using pulsed laser deposition
title_fullStr Preparation of (0 0 1)-oriented PZT thin films on silicon wafers using pulsed laser deposition
title_full_unstemmed Preparation of (0 0 1)-oriented PZT thin films on silicon wafers using pulsed laser deposition
title_sort preparation of (0 0 1)-oriented pzt thin films on silicon wafers using pulsed laser deposition
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/86060
_version_ 1821187542718873600