X-ray stress evaluation in phase change GeSbTe material and TiW electrodes
Japanese Journal of Applied Physics
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2014
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sg-nus-scholar.10635-868482021-10-04T09:22:02Z X-ray stress evaluation in phase change GeSbTe material and TiW electrodes Li, M. Shi, L. Zhao, R. Chong, T.C. Li, Y. MATERIALS SCIENCE AND ENGINEERING Japanese Journal of Applied Physics 49 5 PART 1 0580031-0580032 2014-10-07T09:55:32Z 2014-10-07T09:55:32Z 2010-05 Li, M., Shi, L., Zhao, R., Chong, T.C., Li, Y. (2010-05). X-ray stress evaluation in phase change GeSbTe material and TiW electrodes. Japanese Journal of Applied Physics 49 (5 PART 1) : 0580031-0580032. ScholarBank@NUS Repository. 00214922 http://scholarbank.nus.edu.sg/handle/10635/86848 000277998700066 Scopus |
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National University of Singapore |
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NUS Library |
| continent |
Asia |
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Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
Japanese Journal of Applied Physics |
| author2 |
MATERIALS SCIENCE AND ENGINEERING |
| author_facet |
MATERIALS SCIENCE AND ENGINEERING Li, M. Shi, L. Zhao, R. Chong, T.C. Li, Y. |
| author |
Li, M. Shi, L. Zhao, R. Chong, T.C. Li, Y. |
| spellingShingle |
Li, M. Shi, L. Zhao, R. Chong, T.C. Li, Y. X-ray stress evaluation in phase change GeSbTe material and TiW electrodes |
| author_sort |
Li, M. |
| title |
X-ray stress evaluation in phase change GeSbTe material and TiW electrodes |
| title_short |
X-ray stress evaluation in phase change GeSbTe material and TiW electrodes |
| title_full |
X-ray stress evaluation in phase change GeSbTe material and TiW electrodes |
| title_fullStr |
X-ray stress evaluation in phase change GeSbTe material and TiW electrodes |
| title_full_unstemmed |
X-ray stress evaluation in phase change GeSbTe material and TiW electrodes |
| title_sort |
x-ray stress evaluation in phase change gesbte material and tiw electrodes |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/86848 |
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1713207721884385280 |