APA引文

Tan, Y., Chooi, S., Sin, C., Ee, P., Srinivasan, M., Pehkonen, S., & ENGINEERING, C. &. B. (2014). Characterization of low-k dielectric trench surface cleaning after a fluorocarbon etch.

Chicago Style Citation

Tan, Y.S., S.Y.M Chooi, C.-Y Sin, P.-Y Ee, M.P Srinivasan, S.O Pehkonen, and CHEMICAL & BIOMOLECULAR ENGINEERING. Characterization of Low-k Dielectric Trench Surface Cleaning After a Fluorocarbon Etch. 2014.

MLA引文

Tan, Y.S., et al. Characterization of Low-k Dielectric Trench Surface Cleaning After a Fluorocarbon Etch. 2014.