In situ synthesis of high density sub-50 nm zno nanopatterned arrays using diblock copolymer templates

• Main Authors: Suresh, V., Huang, M.S., Srinivasan, M.P., Krishnamoorthy, S.
• Other Authors: CHEMICAL & BIOMOLECULAR ENGINEERING
• Format: Article
• Published: 2014
• Subjects: atomic layer deposition; block copolymer; flash memory device; nanoarrays; nanolithography; nanoparticle; nanopattern; self-assembly; sub-50 nm patterning; ZnO
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/89209
• Institution: National University of Singapore

10.1021/am401189p