Preparation of (001)-oriented PZT thick films on silicon wafer by pulsed laser deposition

Materials Science and Engineering A

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Bibliographic Details
Main Authors:	Liu, J.-M., Xu, S.Y., Zhou, W.Z., Jiang, X.H., Ong, C.K., Lim, L.C.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	Ferroelectric and piezoelectric property Pulsed laser deposition PZT thick film
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/92775
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-92775
record_format	dspace
spelling	sg-nus-scholar.10635-927752015-02-07T10:09:33Z Preparation of (001)-oriented PZT thick films on silicon wafer by pulsed laser deposition Liu, J.-M. Xu, S.Y. Zhou, W.Z. Jiang, X.H. Ong, C.K. Lim, L.C. PHYSICS MECHANICAL & PRODUCTION ENGINEERING Ferroelectric and piezoelectric property Pulsed laser deposition PZT thick film Materials Science and Engineering A 269 1-2 67-72 2014-10-16T03:08:21Z 2014-10-16T03:08:21Z 1999 Article Liu, J.-M.,Xu, S.Y.,Zhou, W.Z.,Jiang, X.H.,Ong, C.K.,Lim, L.C. (1999). Preparation of (001)-oriented PZT thick films on silicon wafer by pulsed laser deposition. Materials Science and Engineering A 269 (1-2) : 67-72. ScholarBank@NUS Repository. 09215093 http://scholarbank.nus.edu.sg/handle/10635/92775 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Ferroelectric and piezoelectric property Pulsed laser deposition PZT thick film
spellingShingle	Ferroelectric and piezoelectric property Pulsed laser deposition PZT thick film Liu, J.-M. Xu, S.Y. Zhou, W.Z. Jiang, X.H. Ong, C.K. Lim, L.C. Preparation of (001)-oriented PZT thick films on silicon wafer by pulsed laser deposition
description	Materials Science and Engineering A
author2	PHYSICS
author_facet	PHYSICS Liu, J.-M. Xu, S.Y. Zhou, W.Z. Jiang, X.H. Ong, C.K. Lim, L.C.
format	Article
author	Liu, J.-M. Xu, S.Y. Zhou, W.Z. Jiang, X.H. Ong, C.K. Lim, L.C.
author_sort	Liu, J.-M.
title	Preparation of (001)-oriented PZT thick films on silicon wafer by pulsed laser deposition
title_short	Preparation of (001)-oriented PZT thick films on silicon wafer by pulsed laser deposition
title_full	Preparation of (001)-oriented PZT thick films on silicon wafer by pulsed laser deposition
title_fullStr	Preparation of (001)-oriented PZT thick films on silicon wafer by pulsed laser deposition
title_full_unstemmed	Preparation of (001)-oriented PZT thick films on silicon wafer by pulsed laser deposition
title_sort	preparation of (001)-oriented pzt thick films on silicon wafer by pulsed laser deposition
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/92775
_version_	1681090996973076480

Preparation of (001)-oriented PZT thick films on silicon wafer by pulsed laser deposition

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