Collaborative design software for MEMS

Proceedings of SPIE - The International Society for Optical Engineering

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Bibliographic Details
Main Author: Tay, Francis E.H.
Other Authors: MECHANICAL & PRODUCTION ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/92823
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-928232015-01-16T21:12:07Z Collaborative design software for MEMS Tay, Francis E.H. MECHANICAL & PRODUCTION ENGINEERING Proceedings of SPIE - The International Society for Optical Engineering 3894 152-158 PSISD 2014-10-16T03:08:52Z 2014-10-16T03:08:52Z 1999 Conference Paper Tay, Francis E.H. (1999). Collaborative design software for MEMS. Proceedings of SPIE - The International Society for Optical Engineering 3894 : 152-158. ScholarBank@NUS Repository. 0277786X http://scholarbank.nus.edu.sg/handle/10635/92823 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description Proceedings of SPIE - The International Society for Optical Engineering
author2 MECHANICAL & PRODUCTION ENGINEERING
author_facet MECHANICAL & PRODUCTION ENGINEERING
Tay, Francis E.H.
format Conference or Workshop Item
author Tay, Francis E.H.
spellingShingle Tay, Francis E.H.
Collaborative design software for MEMS
author_sort Tay, Francis E.H.
title Collaborative design software for MEMS
title_short Collaborative design software for MEMS
title_full Collaborative design software for MEMS
title_fullStr Collaborative design software for MEMS
title_full_unstemmed Collaborative design software for MEMS
title_sort collaborative design software for mems
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/92823
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