Alternative NH4F/HCl solution for ultraclean Si(001) surface
10.1116/1.1286201
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sg-nus-scholar.10635-930712023-10-31T07:35:53Z Alternative NH4F/HCl solution for ultraclean Si(001) surface Bok, T.H. Ye, J.H. Li, S.F.Y. CHEMISTRY 10.1116/1.1286201 Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 18 5 2542-2548 JVTAD 2014-10-16T08:20:02Z 2014-10-16T08:20:02Z 2000-09 Article Bok, T.H., Ye, J.H., Li, S.F.Y. (2000-09). Alternative NH4F/HCl solution for ultraclean Si(001) surface. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 18 (5) : 2542-2548. ScholarBank@NUS Repository. https://doi.org/10.1116/1.1286201 07342101 http://scholarbank.nus.edu.sg/handle/10635/93071 000089434800078 Scopus |
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National University of Singapore |
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Asia |
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Singapore Singapore |
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NUS Library |
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| description |
10.1116/1.1286201 |
| author2 |
CHEMISTRY |
| author_facet |
CHEMISTRY Bok, T.H. Ye, J.H. Li, S.F.Y. |
| format |
Article |
| author |
Bok, T.H. Ye, J.H. Li, S.F.Y. |
| spellingShingle |
Bok, T.H. Ye, J.H. Li, S.F.Y. Alternative NH4F/HCl solution for ultraclean Si(001) surface |
| author_sort |
Bok, T.H. |
| title |
Alternative NH4F/HCl solution for ultraclean Si(001) surface |
| title_short |
Alternative NH4F/HCl solution for ultraclean Si(001) surface |
| title_full |
Alternative NH4F/HCl solution for ultraclean Si(001) surface |
| title_fullStr |
Alternative NH4F/HCl solution for ultraclean Si(001) surface |
| title_full_unstemmed |
Alternative NH4F/HCl solution for ultraclean Si(001) surface |
| title_sort |
alternative nh4f/hcl solution for ultraclean si(001) surface |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/93071 |
| _version_ |
1781785855758696448 |