APA引文

Chew, K., Rusli, Yoon, S., Ahn, J., Ligatchev, V., Teo, E., . . . PHYSICS. (2014). Hydrogenated amorphous silicon carbide deposition using electron cyclotron resonance chemical vapor deposition under high microwave power and strong hydrogen dilution.

Chicago Style Citation

Chew, K., Rusli, S.F Yoon, J. Ahn, V. Ligatchev, E.J Teo, T. Osipowicz, F. Watt, and PHYSICS. Hydrogenated Amorphous Silicon Carbide Deposition Using Electron Cyclotron Resonance Chemical Vapor Deposition Under High Microwave Power and Strong Hydrogen Dilution. 2014.

MLA引文

Chew, K., et al. Hydrogenated Amorphous Silicon Carbide Deposition Using Electron Cyclotron Resonance Chemical Vapor Deposition Under High Microwave Power and Strong Hydrogen Dilution. 2014.