Chew, K., Rusli, Yoon, S., Ahn, J., Ligatchev, V., Teo, E., . . . PHYSICS. (2014). Hydrogenated amorphous silicon carbide deposition using electron cyclotron resonance chemical vapor deposition under high microwave power and strong hydrogen dilution.

Chew, K., Rusli, S.F Yoon, J. Ahn, V. Ligatchev, E.J Teo, T. Osipowicz, F. Watt, و PHYSICS. Hydrogenated Amorphous Silicon Carbide Deposition Using Electron Cyclotron Resonance Chemical Vapor Deposition Under High Microwave Power and Strong Hydrogen Dilution. 2014.

Chew, K., et al. Hydrogenated Amorphous Silicon Carbide Deposition Using Electron Cyclotron Resonance Chemical Vapor Deposition Under High Microwave Power and Strong Hydrogen Dilution. 2014.