Chew, K., Rusli, Yoon, S., Ahn, J., Ligatchev, V., Teo, E., . . . PHYSICS. (2014). Hydrogenated amorphous silicon carbide deposition using electron cyclotron resonance chemical vapor deposition under high microwave power and strong hydrogen dilution.
Chicago Style CitationChew, K., Rusli, S.F Yoon, J. Ahn, V. Ligatchev, E.J Teo, T. Osipowicz, F. Watt, and PHYSICS. Hydrogenated Amorphous Silicon Carbide Deposition Using Electron Cyclotron Resonance Chemical Vapor Deposition Under High Microwave Power and Strong Hydrogen Dilution. 2014.
MLA CitationChew, K., et al. Hydrogenated Amorphous Silicon Carbide Deposition Using Electron Cyclotron Resonance Chemical Vapor Deposition Under High Microwave Power and Strong Hydrogen Dilution. 2014.
Warning: These citations may not always be 100% accurate.