A review of ion beam induced charge microscopy

10.1016/j.nimb.2007.09.031

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Bibliographic Details
Main Authors: Breese, M.B.H., Vittone, E., Vizkelethy, G., Sellin, P.J.
Other Authors: PHYSICS
Format: Article
Published: 2014
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Online Access:http://scholarbank.nus.edu.sg/handle/10635/95679
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Institution: National University of Singapore
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Summary:10.1016/j.nimb.2007.09.031