Argon incorporation and silicon carbide formation during low energy argon-ion bombardment of Si(100)

Argon incorporation and silicon carbide formation during low energy argon-ion bombardment of Si(100)

Journal of Applied Physics

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Main Authors: Pan, J.S., Wee, A.T.S., Huan, C.H.A., Tan, H.S., Tan, K.L.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/95819
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-958192015-01-12T13:48:41Z Argon incorporation and silicon carbide formation during low energy argon-ion bombardment of Si(100) Pan, J.S. Wee, A.T.S. Huan, C.H.A. Tan, H.S. Tan, K.L. PHYSICS Journal of Applied Physics 79 6 2934-2941 JAPIA 2014-10-16T09:16:11Z 2014-10-16T09:16:11Z 1996-03-15 Article Pan, J.S.,Wee, A.T.S.,Huan, C.H.A.,Tan, H.S.,Tan, K.L. (1996-03-15). Argon incorporation and silicon carbide formation during low energy argon-ion bombardment of Si(100). Journal of Applied Physics 79 (6) : 2934-2941. ScholarBank@NUS Repository. 00218979 http://scholarbank.nus.edu.sg/handle/10635/95819 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description Journal of Applied Physics
author2 PHYSICS
author_facet PHYSICS
Pan, J.S.
Wee, A.T.S.
Huan, C.H.A.
Tan, H.S.
Tan, K.L.
format Article
author Pan, J.S.
Wee, A.T.S.
Huan, C.H.A.
Tan, H.S.
Tan, K.L.
spellingShingle Pan, J.S.
Wee, A.T.S.
Huan, C.H.A.
Tan, H.S.
Tan, K.L.
Argon incorporation and silicon carbide formation during low energy argon-ion bombardment of Si(100)
author_sort Pan, J.S.
title Argon incorporation and silicon carbide formation during low energy argon-ion bombardment of Si(100)
title_short Argon incorporation and silicon carbide formation during low energy argon-ion bombardment of Si(100)
title_full Argon incorporation and silicon carbide formation during low energy argon-ion bombardment of Si(100)
title_fullStr Argon incorporation and silicon carbide formation during low energy argon-ion bombardment of Si(100)
title_full_unstemmed Argon incorporation and silicon carbide formation during low energy argon-ion bombardment of Si(100)
title_sort argon incorporation and silicon carbide formation during low energy argon-ion bombardment of si(100)
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/95819
_version_ 1681091547382153216

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