Designs of multi-target carousels for pulsed-laser deposition systems

10.1088/0957-0233/9/11/018

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Bibliographic Details
Main Authors:	Xu, S.Y., Tan, C.W., Ong, C.K.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	Laser-molecular-beam-epitaxy Multi-layered thin films Multi-target carousel Pulsed-laser deposition
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/96180
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-96180
record_format	dspace
spelling	sg-nus-scholar.10635-961802024-11-09T23:32:46Z Designs of multi-target carousels for pulsed-laser deposition systems Xu, S.Y. Tan, C.W. Ong, C.K. PHYSICS Laser-molecular-beam-epitaxy Multi-layered thin films Multi-target carousel Pulsed-laser deposition 10.1088/0957-0233/9/11/018 Measurement Science and Technology 9 11 1912-1915 MSTCE 2014-10-16T09:20:28Z 2014-10-16T09:20:28Z 1998-11 Article Xu, S.Y., Tan, C.W., Ong, C.K. (1998-11). Designs of multi-target carousels for pulsed-laser deposition systems. Measurement Science and Technology 9 (11) : 1912-1915. ScholarBank@NUS Repository. https://doi.org/10.1088/0957-0233/9/11/018 09570233 http://scholarbank.nus.edu.sg/handle/10635/96180 000076975300018 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Laser-molecular-beam-epitaxy Multi-layered thin films Multi-target carousel Pulsed-laser deposition
spellingShingle	Laser-molecular-beam-epitaxy Multi-layered thin films Multi-target carousel Pulsed-laser deposition Xu, S.Y. Tan, C.W. Ong, C.K. Designs of multi-target carousels for pulsed-laser deposition systems
description	10.1088/0957-0233/9/11/018
author2	PHYSICS
author_facet	PHYSICS Xu, S.Y. Tan, C.W. Ong, C.K.
format	Article
author	Xu, S.Y. Tan, C.W. Ong, C.K.
author_sort	Xu, S.Y.
title	Designs of multi-target carousels for pulsed-laser deposition systems
title_short	Designs of multi-target carousels for pulsed-laser deposition systems
title_full	Designs of multi-target carousels for pulsed-laser deposition systems
title_fullStr	Designs of multi-target carousels for pulsed-laser deposition systems
title_full_unstemmed	Designs of multi-target carousels for pulsed-laser deposition systems
title_sort	designs of multi-target carousels for pulsed-laser deposition systems
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/96180
_version_	1821201078575693824

Designs of multi-target carousels for pulsed-laser deposition systems

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