Fabrication of complex curved three-dimensional silicon microstructures using ion irradiation
10.1088/0960-1317/22/1/015015
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sg-nus-scholar.10635-965902023-10-29T23:32:00Z Fabrication of complex curved three-dimensional silicon microstructures using ion irradiation Azimi, S. Breese, M.B.H. Dang, Z.Y. Yan, Y. Ow, Y.S. Bettiol, A.A. PHYSICS 10.1088/0960-1317/22/1/015015 Journal of Micromechanics and Microengineering 22 1 - JMMIE 2014-10-16T09:25:12Z 2014-10-16T09:25:12Z 2012-01 Article Azimi, S., Breese, M.B.H., Dang, Z.Y., Yan, Y., Ow, Y.S., Bettiol, A.A. (2012-01). Fabrication of complex curved three-dimensional silicon microstructures using ion irradiation. Journal of Micromechanics and Microengineering 22 (1) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/22/1/015015 09601317 http://scholarbank.nus.edu.sg/handle/10635/96590 000298662800016 Scopus |
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National University of Singapore |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
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10.1088/0960-1317/22/1/015015 |
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PHYSICS |
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PHYSICS Azimi, S. Breese, M.B.H. Dang, Z.Y. Yan, Y. Ow, Y.S. Bettiol, A.A. |
| format |
Article |
| author |
Azimi, S. Breese, M.B.H. Dang, Z.Y. Yan, Y. Ow, Y.S. Bettiol, A.A. |
| spellingShingle |
Azimi, S. Breese, M.B.H. Dang, Z.Y. Yan, Y. Ow, Y.S. Bettiol, A.A. Fabrication of complex curved three-dimensional silicon microstructures using ion irradiation |
| author_sort |
Azimi, S. |
| title |
Fabrication of complex curved three-dimensional silicon microstructures using ion irradiation |
| title_short |
Fabrication of complex curved three-dimensional silicon microstructures using ion irradiation |
| title_full |
Fabrication of complex curved three-dimensional silicon microstructures using ion irradiation |
| title_fullStr |
Fabrication of complex curved three-dimensional silicon microstructures using ion irradiation |
| title_full_unstemmed |
Fabrication of complex curved three-dimensional silicon microstructures using ion irradiation |
| title_sort |
fabrication of complex curved three-dimensional silicon microstructures using ion irradiation |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/96590 |
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1781786496775225344 |