Fabrication of TiN thin film by shadow-masked pulsed laser deposition
10.1016/S0040-6090(00)01694-1
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2014
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sg-nus-scholar.10635-966022023-10-30T22:49:55Z Fabrication of TiN thin film by shadow-masked pulsed laser deposition Chen, C. Ong, P.P. Wang, H. PHYSICS 10.1016/S0040-6090(00)01694-1 Thin Solid Films 382 1-2 275-279 THSFA 2014-10-16T09:25:23Z 2014-10-16T09:25:23Z 2001-02-01 Article Chen, C., Ong, P.P., Wang, H. (2001-02-01). Fabrication of TiN thin film by shadow-masked pulsed laser deposition. Thin Solid Films 382 (1-2) : 275-279. ScholarBank@NUS Repository. https://doi.org/10.1016/S0040-6090(00)01694-1 00406090 http://scholarbank.nus.edu.sg/handle/10635/96602 000167268700041 Scopus |
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National University of Singapore |
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Singapore Singapore |
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| description |
10.1016/S0040-6090(00)01694-1 |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Chen, C. Ong, P.P. Wang, H. |
| format |
Article |
| author |
Chen, C. Ong, P.P. Wang, H. |
| spellingShingle |
Chen, C. Ong, P.P. Wang, H. Fabrication of TiN thin film by shadow-masked pulsed laser deposition |
| author_sort |
Chen, C. |
| title |
Fabrication of TiN thin film by shadow-masked pulsed laser deposition |
| title_short |
Fabrication of TiN thin film by shadow-masked pulsed laser deposition |
| title_full |
Fabrication of TiN thin film by shadow-masked pulsed laser deposition |
| title_fullStr |
Fabrication of TiN thin film by shadow-masked pulsed laser deposition |
| title_full_unstemmed |
Fabrication of TiN thin film by shadow-masked pulsed laser deposition |
| title_sort |
fabrication of tin thin film by shadow-masked pulsed laser deposition |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/96602 |
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1781786498782199808 |