Ion beam studies on reactive DC sputtered manganese doped indium tin oxide thin films

10.1016/j.nimb.2007.12.075

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Bibliographic Details
Main Authors: Sarath Kumar, S.R., Malar, P., Osipowicz, T., Banerjee, S.S., Kasiviswanathan, S.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
DMS
TCO
Online Access:http://scholarbank.nus.edu.sg/handle/10635/96993
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-969932023-10-30T08:23:13Z Ion beam studies on reactive DC sputtered manganese doped indium tin oxide thin films Sarath Kumar, S.R. Malar, P. Osipowicz, T. Banerjee, S.S. Kasiviswanathan, S. PHYSICS DMS Interface TCO Thin films 10.1016/j.nimb.2007.12.075 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 266 8 1421-1424 NIMBE 2014-10-16T09:30:00Z 2014-10-16T09:30:00Z 2008-04 Article Sarath Kumar, S.R., Malar, P., Osipowicz, T., Banerjee, S.S., Kasiviswanathan, S. (2008-04). Ion beam studies on reactive DC sputtered manganese doped indium tin oxide thin films. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 266 (8) : 1421-1424. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2007.12.075 0168583X http://scholarbank.nus.edu.sg/handle/10635/96993 000256677600057 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic DMS
Interface
TCO
Thin films
spellingShingle DMS
Interface
TCO
Thin films
Sarath Kumar, S.R.
Malar, P.
Osipowicz, T.
Banerjee, S.S.
Kasiviswanathan, S.
Ion beam studies on reactive DC sputtered manganese doped indium tin oxide thin films
description 10.1016/j.nimb.2007.12.075
author2 PHYSICS
author_facet PHYSICS
Sarath Kumar, S.R.
Malar, P.
Osipowicz, T.
Banerjee, S.S.
Kasiviswanathan, S.
format Article
author Sarath Kumar, S.R.
Malar, P.
Osipowicz, T.
Banerjee, S.S.
Kasiviswanathan, S.
author_sort Sarath Kumar, S.R.
title Ion beam studies on reactive DC sputtered manganese doped indium tin oxide thin films
title_short Ion beam studies on reactive DC sputtered manganese doped indium tin oxide thin films
title_full Ion beam studies on reactive DC sputtered manganese doped indium tin oxide thin films
title_fullStr Ion beam studies on reactive DC sputtered manganese doped indium tin oxide thin films
title_full_unstemmed Ion beam studies on reactive DC sputtered manganese doped indium tin oxide thin films
title_sort ion beam studies on reactive dc sputtered manganese doped indium tin oxide thin films
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/96993
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