Nickel and copper electroplating of proton beam micromachined SU-8 resist

10.1007/s00542-001-0139-5

Saved in:

Bibliographic Details
Main Authors:	Van Kan, J.A., Rajta, I., Ansari, K., Bettiol, A.A., Watt, F.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/97323
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-97323
record_format	dspace
spelling	sg-nus-scholar.10635-973232023-10-26T08:01:48Z Nickel and copper electroplating of proton beam micromachined SU-8 resist Van Kan, J.A. Rajta, I. Ansari, K. Bettiol, A.A. Watt, F. PHYSICS 10.1007/s00542-001-0139-5 Microsystem Technologies 8 6 383-386 2014-10-16T09:33:54Z 2014-10-16T09:33:54Z 2002-09 Article Van Kan, J.A., Rajta, I., Ansari, K., Bettiol, A.A., Watt, F. (2002-09). Nickel and copper electroplating of proton beam micromachined SU-8 resist. Microsystem Technologies 8 (6) : 383-386. ScholarBank@NUS Repository. https://doi.org/10.1007/s00542-001-0139-5 09467076 http://scholarbank.nus.edu.sg/handle/10635/97323 000178720100004 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1007/s00542-001-0139-5
author2	PHYSICS
author_facet	PHYSICS Van Kan, J.A. Rajta, I. Ansari, K. Bettiol, A.A. Watt, F.
format	Article
author	Van Kan, J.A. Rajta, I. Ansari, K. Bettiol, A.A. Watt, F.
spellingShingle	Van Kan, J.A. Rajta, I. Ansari, K. Bettiol, A.A. Watt, F. Nickel and copper electroplating of proton beam micromachined SU-8 resist
author_sort	Van Kan, J.A.
title	Nickel and copper electroplating of proton beam micromachined SU-8 resist
title_short	Nickel and copper electroplating of proton beam micromachined SU-8 resist
title_full	Nickel and copper electroplating of proton beam micromachined SU-8 resist
title_fullStr	Nickel and copper electroplating of proton beam micromachined SU-8 resist
title_full_unstemmed	Nickel and copper electroplating of proton beam micromachined SU-8 resist
title_sort	nickel and copper electroplating of proton beam micromachined su-8 resist
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/97323
_version_	1781786648007147520

Nickel and copper electroplating of proton beam micromachined SU-8 resist

Similar Items