Self-organized nanodot formation on InP(100) by argon ion sputtering at normal incidence
10.1116/1.2203643
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sg-nus-scholar.10635-978972023-10-30T22:40:44Z Self-organized nanodot formation on InP(100) by argon ion sputtering at normal incidence Tan, S.K. Wee, A.T.S. PHYSICS 10.1116/1.2203643 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 24 3 1444-1448 JVTBD 2014-10-16T09:40:38Z 2014-10-16T09:40:38Z 2006-05 Article Tan, S.K., Wee, A.T.S. (2006-05). Self-organized nanodot formation on InP(100) by argon ion sputtering at normal incidence. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 24 (3) : 1444-1448. ScholarBank@NUS Repository. https://doi.org/10.1116/1.2203643 10711023 http://scholarbank.nus.edu.sg/handle/10635/97897 000238790000065 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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| description |
10.1116/1.2203643 |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Tan, S.K. Wee, A.T.S. |
| format |
Article |
| author |
Tan, S.K. Wee, A.T.S. |
| spellingShingle |
Tan, S.K. Wee, A.T.S. Self-organized nanodot formation on InP(100) by argon ion sputtering at normal incidence |
| author_sort |
Tan, S.K. |
| title |
Self-organized nanodot formation on InP(100) by argon ion sputtering at normal incidence |
| title_short |
Self-organized nanodot formation on InP(100) by argon ion sputtering at normal incidence |
| title_full |
Self-organized nanodot formation on InP(100) by argon ion sputtering at normal incidence |
| title_fullStr |
Self-organized nanodot formation on InP(100) by argon ion sputtering at normal incidence |
| title_full_unstemmed |
Self-organized nanodot formation on InP(100) by argon ion sputtering at normal incidence |
| title_sort |
self-organized nanodot formation on inp(100) by argon ion sputtering at normal incidence |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/97897 |
| _version_ |
1781786764971606016 |