Sub 100 nm proton beam micromachining: theoretical calculations on resolution limits
10.1016/S0168-583X(99)00862-9
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sg-nus-scholar.10635-981002024-11-14T01:01:19Z Sub 100 nm proton beam micromachining: theoretical calculations on resolution limits Van Kan, J.A. Sum, T.C. Osipowicz, T. Watt, F. PHYSICS 10.1016/S0168-583X(99)00862-9 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 161 366-370 NIMBE 2014-10-16T09:43:02Z 2014-10-16T09:43:02Z 2000-03 Article Van Kan, J.A., Sum, T.C., Osipowicz, T., Watt, F. (2000-03). Sub 100 nm proton beam micromachining: theoretical calculations on resolution limits. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 161 : 366-370. ScholarBank@NUS Repository. https://doi.org/10.1016/S0168-583X(99)00862-9 0168583X http://scholarbank.nus.edu.sg/handle/10635/98100 000086204100066 Scopus |
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10.1016/S0168-583X(99)00862-9 |
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PHYSICS |
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PHYSICS Van Kan, J.A. Sum, T.C. Osipowicz, T. Watt, F. |
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Article |
| author |
Van Kan, J.A. Sum, T.C. Osipowicz, T. Watt, F. |
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Van Kan, J.A. Sum, T.C. Osipowicz, T. Watt, F. Sub 100 nm proton beam micromachining: theoretical calculations on resolution limits |
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Van Kan, J.A. |
| title |
Sub 100 nm proton beam micromachining: theoretical calculations on resolution limits |
| title_short |
Sub 100 nm proton beam micromachining: theoretical calculations on resolution limits |
| title_full |
Sub 100 nm proton beam micromachining: theoretical calculations on resolution limits |
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Sub 100 nm proton beam micromachining: theoretical calculations on resolution limits |
| title_full_unstemmed |
Sub 100 nm proton beam micromachining: theoretical calculations on resolution limits |
| title_sort |
sub 100 nm proton beam micromachining: theoretical calculations on resolution limits |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/98100 |
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