Surface transient effects in ultralow-energy Cs+ sputtering of Si

10.1002/sia.2541

Saved in:

Bibliographic Details
Main Authors:	Chanbasha, A.R., Wee, A.T.S.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	Secondary ion mass spectroscopy Sputter rate Surface transient Ultralow energy
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98145
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-98145
record_format	dspace
spelling	sg-nus-scholar.10635-981452023-10-29T22:34:27Z Surface transient effects in ultralow-energy Cs+ sputtering of Si Chanbasha, A.R. Wee, A.T.S. PHYSICS Secondary ion mass spectroscopy Sputter rate Surface transient Ultralow energy 10.1002/sia.2541 Surface and Interface Analysis 39 5 397-404 SIAND 2014-10-16T09:43:32Z 2014-10-16T09:43:32Z 2007-05 Article Chanbasha, A.R., Wee, A.T.S. (2007-05). Surface transient effects in ultralow-energy Cs+ sputtering of Si. Surface and Interface Analysis 39 (5) : 397-404. ScholarBank@NUS Repository. https://doi.org/10.1002/sia.2541 01422421 http://scholarbank.nus.edu.sg/handle/10635/98145 000245705200005 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Secondary ion mass spectroscopy Sputter rate Surface transient Ultralow energy
spellingShingle	Secondary ion mass spectroscopy Sputter rate Surface transient Ultralow energy Chanbasha, A.R. Wee, A.T.S. Surface transient effects in ultralow-energy Cs+ sputtering of Si
description	10.1002/sia.2541
author2	PHYSICS
author_facet	PHYSICS Chanbasha, A.R. Wee, A.T.S.
format	Article
author	Chanbasha, A.R. Wee, A.T.S.
author_sort	Chanbasha, A.R.
title	Surface transient effects in ultralow-energy Cs+ sputtering of Si
title_short	Surface transient effects in ultralow-energy Cs+ sputtering of Si
title_full	Surface transient effects in ultralow-energy Cs+ sputtering of Si
title_fullStr	Surface transient effects in ultralow-energy Cs+ sputtering of Si
title_full_unstemmed	Surface transient effects in ultralow-energy Cs+ sputtering of Si
title_sort	surface transient effects in ultralow-energy cs+ sputtering of si
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/98145
_version_	1781786811773747200

Surface transient effects in ultralow-energy Cs+ sputtering of Si

Similar Items