Improvement in proton beam writing at the nano scale

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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Bibliographic Details
Main Authors:	Van Kan, J.A., Bettiol, A.A., Ansari, K., Shao, P., Watt, F.
Other Authors:	PHYSICS
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98753
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Institution:	National University of Singapore

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record_format	dspace
spelling	sg-nus-scholar.10635-987532024-11-14T01:01:29Z Improvement in proton beam writing at the nano scale Van Kan, J.A. Bettiol, A.A. Ansari, K. Shao, P. Watt, F. PHYSICS Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 673-676 PMEME 2014-10-16T09:51:01Z 2014-10-16T09:51:01Z 2004 Conference Paper Van Kan, J.A.,Bettiol, A.A.,Ansari, K.,Shao, P.,Watt, F. (2004). Improvement in proton beam writing at the nano scale. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) : 673-676. ScholarBank@NUS Repository. 10846999 http://scholarbank.nus.edu.sg/handle/10635/98753 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
author2	PHYSICS
author_facet	PHYSICS Van Kan, J.A. Bettiol, A.A. Ansari, K. Shao, P. Watt, F.
format	Conference or Workshop Item
author	Van Kan, J.A. Bettiol, A.A. Ansari, K. Shao, P. Watt, F.
spellingShingle	Van Kan, J.A. Bettiol, A.A. Ansari, K. Shao, P. Watt, F. Improvement in proton beam writing at the nano scale
author_sort	Van Kan, J.A.
title	Improvement in proton beam writing at the nano scale
title_short	Improvement in proton beam writing at the nano scale
title_full	Improvement in proton beam writing at the nano scale
title_fullStr	Improvement in proton beam writing at the nano scale
title_full_unstemmed	Improvement in proton beam writing at the nano scale
title_sort	improvement in proton beam writing at the nano scale
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/98753
_version_	1821231225260474368

Improvement in proton beam writing at the nano scale

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