New fabrication technology for photonic crystal waveguides
10.1117/12.567602
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2014
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sg-nus-scholar.10635-988082023-10-29T23:14:58Z New fabrication technology for photonic crystal waveguides Mehta, S.S. Murthy, B.R. Hui, Z. Suryani Ji, W. Iyer, M.K. My, D. PHYSICS BARC etch Diffraction orders DUV lithography Photonic crystals Polygons 10.1117/12.567602 Proceedings of SPIE - The International Society for Optical Engineering 5577 PART 2 550-560 PSISD 2014-10-16T09:51:41Z 2014-10-16T09:51:41Z 2004 Conference Paper Mehta, S.S., Murthy, B.R., Hui, Z., Suryani, Ji, W., Iyer, M.K., My, D. (2004). New fabrication technology for photonic crystal waveguides. Proceedings of SPIE - The International Society for Optical Engineering 5577 (PART 2) : 550-560. ScholarBank@NUS Repository. https://doi.org/10.1117/12.567602 0277786X http://scholarbank.nus.edu.sg/handle/10635/98808 000226463500063 Scopus |
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National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
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Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
BARC etch Diffraction orders DUV lithography Photonic crystals Polygons |
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BARC etch Diffraction orders DUV lithography Photonic crystals Polygons Mehta, S.S. Murthy, B.R. Hui, Z. Suryani Ji, W. Iyer, M.K. My, D. New fabrication technology for photonic crystal waveguides |
| description |
10.1117/12.567602 |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Mehta, S.S. Murthy, B.R. Hui, Z. Suryani Ji, W. Iyer, M.K. My, D. |
| format |
Conference or Workshop Item |
| author |
Mehta, S.S. Murthy, B.R. Hui, Z. Suryani Ji, W. Iyer, M.K. My, D. |
| author_sort |
Mehta, S.S. |
| title |
New fabrication technology for photonic crystal waveguides |
| title_short |
New fabrication technology for photonic crystal waveguides |
| title_full |
New fabrication technology for photonic crystal waveguides |
| title_fullStr |
New fabrication technology for photonic crystal waveguides |
| title_full_unstemmed |
New fabrication technology for photonic crystal waveguides |
| title_sort |
new fabrication technology for photonic crystal waveguides |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/98808 |
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1781786952261959680 |