Proton beam writing nanoprobe facility design and first test results

10.1016/j.nima.2010.12.011

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Bibliographic Details
Main Authors: Van Kan, J.A., Malar, P., De Vera, A.B., Chen, X., Bettiol, A.A., Watt, F.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98852
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Institution: National University of Singapore