Proton beam writing of passive waveguides in PMMA

10.1016/S0168-583X(03)01028-0

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Main Authors:	Sum, T.C., Bettiol, A.A., Seng, H.L., Rajta, I., Van Kan, J.A., Watt, F.
Other Authors:	PHYSICS
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Buried channel waveguides PMMA Proton beam writing Surface compaction
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98857
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-98857
record_format	dspace
spelling	sg-nus-scholar.10635-988572023-10-30T08:21:29Z Proton beam writing of passive waveguides in PMMA Sum, T.C. Bettiol, A.A. Seng, H.L. Rajta, I. Van Kan, J.A. Watt, F. PHYSICS Buried channel waveguides PMMA Proton beam writing Surface compaction 10.1016/S0168-583X(03)01028-0 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 210 266-271 NIMBE 2014-10-16T09:52:17Z 2014-10-16T09:52:17Z 2003-09 Conference Paper Sum, T.C., Bettiol, A.A., Seng, H.L., Rajta, I., Van Kan, J.A., Watt, F. (2003-09). Proton beam writing of passive waveguides in PMMA. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 210 : 266-271. ScholarBank@NUS Repository. https://doi.org/10.1016/S0168-583X(03)01028-0 0168583X http://scholarbank.nus.edu.sg/handle/10635/98857 000185352300050 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Buried channel waveguides PMMA Proton beam writing Surface compaction
spellingShingle	Buried channel waveguides PMMA Proton beam writing Surface compaction Sum, T.C. Bettiol, A.A. Seng, H.L. Rajta, I. Van Kan, J.A. Watt, F. Proton beam writing of passive waveguides in PMMA
description	10.1016/S0168-583X(03)01028-0
author2	PHYSICS
author_facet	PHYSICS Sum, T.C. Bettiol, A.A. Seng, H.L. Rajta, I. Van Kan, J.A. Watt, F.
format	Conference or Workshop Item
author	Sum, T.C. Bettiol, A.A. Seng, H.L. Rajta, I. Van Kan, J.A. Watt, F.
author_sort	Sum, T.C.
title	Proton beam writing of passive waveguides in PMMA
title_short	Proton beam writing of passive waveguides in PMMA
title_full	Proton beam writing of passive waveguides in PMMA
title_fullStr	Proton beam writing of passive waveguides in PMMA
title_full_unstemmed	Proton beam writing of passive waveguides in PMMA
title_sort	proton beam writing of passive waveguides in pmma
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/98857
_version_	1781786962621890560

Proton beam writing of passive waveguides in PMMA

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