Focussed-Ion-Beam Post Processing Technology for Active Devices

Focused ion beam (FIB) etching technology is a highly efficient post-processing technique with the functionality to perform sputter etching and deposition of metals or insulators by means of a computer-generated mask. The high resolution and the ability to remove material directly from the sample in...

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Bibliographic Details
Main Authors: TEE, Chyng Wen, Lau, F. K., Zhao, X., Penty, R. V., White, I. H.
Format: text
Language:English
Published: Institutional Knowledge at Singapore Management University 2006
Subjects:
Online Access:https://ink.library.smu.edu.sg/lkcsb_research/3336
https://doi.org/10.1117/12.691640
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Institution: Singapore Management University
Language: English