Focussed-Ion-Beam Post Processing Technology for Active Devices
Focused ion beam (FIB) etching technology is a highly efficient post-processing technique with the functionality to perform sputter etching and deposition of metals or insulators by means of a computer-generated mask. The high resolution and the ability to remove material directly from the sample in...
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Main Authors: | , , , , |
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Format: | text |
Language: | English |
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Institutional Knowledge at Singapore Management University
2006
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Subjects: | |
Online Access: | https://ink.library.smu.edu.sg/lkcsb_research/3336 https://doi.org/10.1117/12.691640 |
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Institution: | Singapore Management University |
Language: | English |