Hybrid tabu search algorithm for unrelated parallel machine scheduling in semiconductor fabs with setup times, job release, and expired times

• Main Authors: CHEN, Changyu, FATHI, Madhi, KHAKIFIROOZ, Marzieh, WU, Kan
• Format: text
• Language: English
• Published: Institutional Knowledge at Singapore Management University 2022
• Subjects: Scheduling; Unrelated parallel machines; Setup times; Expired times; Job release; Wafer fabrication; Mixed integer programming; Tabu search; Operations Research, Systems Engineering and Industrial Engineering; Theory and Algorithms
• Online Access: https://ink.library.smu.edu.sg/sis_research/6956; https://ink.library.smu.edu.sg/context/sis_research/article/7959/viewcontent/Hybrid_Tabu_Search_Algor_av.pdf
• Institution: Singapore Management University

This research is motivated by a scheduling problem arising in the ion implantation process of wafer fabrication. The ion implementation scheduling problem is modeled as an unrelated parallel machine scheduling (UPMS) problem with sequence-dependent setup times that are subject to job release time an...