APA引文

Shin, K. S., Sahu, B. B., Kumar, M., Leksakul, K., & Han, J. G. (2018). Tailoring of microstructure in hydrogenated nanocrystalline Si thin films by ICP-assisted RF magnetron sputtering.

Chicago Style Citation

Shin, Kyung Sik, Bibhuti Bhusan Sahu, Manish Kumar, Komgrit Leksakul, and Jeon Geon Han. Tailoring of Microstructure in Hydrogenated Nanocrystalline Si Thin Films By ICP-assisted RF Magnetron Sputtering. 2018.

MLA引文

Shin, Kyung Sik, et al. Tailoring of Microstructure in Hydrogenated Nanocrystalline Si Thin Films By ICP-assisted RF Magnetron Sputtering. 2018.