Fabrication of ethanol sensors based on ZnO thin film field-effect transistor prepared by thermal evaporation deposition
© 2017 Elsevier Ltd. All rights reserved. The field effect transistor ethanol sensor with ZnO nanostructure as sensing layer were fabricated and their ethanol sensing properties at room temperature were investigated. The ZnO thin films were deposited on p-type Si substrate by thermal evaporation dep...
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| Main Authors: | , , |
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| Format: | Conference Proceeding |
| Published: |
2018
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| Subjects: | |
| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85028425378&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/46981 |
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| Institution: | Chiang Mai University |