Development and application of cathodic vacuum arc plasma for nanostructured and nanocomposite film deposition
A cathodic vacuum arc plasma (CVAP) system was constructed at Chiang Mai University to be used for the deposition of nanostructured and nanocomposite thin films. Various CVAP sources were developed, such as with a single or dual-rod cathode. A range of features were implemented including "trigg...
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| Main Authors: | , , , , , |
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| Format: | Journal |
| Published: |
2018
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| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84880569881&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/47710 |
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| Institution: | Chiang Mai University |