Effect of donor and acceptor dopants on fatigue properties in PZT thin films
Fatigue properties of Pb(Zr 0.52 Ti 0.48 )O 3 or PZT thin films on platinized silicon substrates were investigated. Small amounts of WO 3 and CuO nano-particles were added into PZT films, which showed the results of soft and hard doping characteristics, respectively. The additions also affected the...
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| Main Authors: | , , , |
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| Format: | Journal |
| Published: |
2018
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| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84875735153&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/47947 |
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| Institution: | Chiang Mai University |
| Summary: | Fatigue properties of Pb(Zr 0.52 Ti 0.48 )O 3 or PZT thin films on platinized silicon substrates were investigated. Small amounts of WO 3 and CuO nano-particles were added into PZT films, which showed the results of soft and hard doping characteristics, respectively. The additions also affected the fatigue properties of PZT by showing almost no hysteresis fatigue up to 10 8 switching bipolar pulse cycles, while the fatigue of PZT started at 10 6 cycles. The results suggest that the soft and hard doping could reduce the fatigue of PZT films and the oxygen vacancies play an important role in polarization degradation of the films. © 2012 Elsevier Ltd and Techna Group S.r.l. |
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