Electrical and optical properties of ITO/Au/ITO multilayer films for high performance TCO films

• Main Authors: Sutatip Thonglem, Uraiwan Intatha, Kamonpan Pengpat, Gobwute Rujijanagul, Tawee Tunkasiri, Sukum Eitssayeam
• Format: Journal
• Published: 2018
• Online Access: https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84891773064&origin=inward; http://cmuir.cmu.ac.th/jspui/handle/6653943832/48254
• Institution: Chiang Mai University

Effects of a sandwich metallic gold layer on electrical and optical properties of ITO films were investigated in this study. ITO/metal/ITO multilayer films were deposited on borosilicate glass using ultrasonic spray pyrolysis in air atmosphere for the ITO. The metallic layer of Au was coated via a sputtering process in the thickness range of 5-20 nm. The addition of the metalli c layer enhanced conductivity, but reduced the transmittance in the multilayer films. ITO/Au/ITO multilayer films have much lower resistivity than ITO single layer film of the same thickness. The ITO/10nm Au/ITO film had the maximum figure of merit or the best performance of these samples. © 2013 Copyright Taylor and Francis Group, LLC.