Maneekat, C., Phatthanakun, R., Siangchaew, K., & Leksakul, K. (2018). Patterning of burnishing head using SU-8 hard mask fabricated by deep X-ray lithography.
Chicago Style CitationManeekat, Ch, R. Phatthanakun, K. Siangchaew, and K. Leksakul. Patterning of Burnishing Head Using SU-8 Hard Mask Fabricated By Deep X-ray Lithography. 2018.
MLA引文Maneekat, Ch, R. Phatthanakun, K. Siangchaew, and K. Leksakul. Patterning of Burnishing Head Using SU-8 Hard Mask Fabricated By Deep X-ray Lithography. 2018.
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