Electrical and optical properties of ITO/Au/ITO multilayer films for high performance TCO films
Effects of a sandwich metallic gold layer on electrical and optical properties of ITO films were investigated in this study. ITO/metal/ITO multilayer films were deposited on borosilicate glass using ultrasonic spray pyrolysis in air atmosphere for the ITO. The metallic layer of Au was coated via a s...
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| Main Authors: | , , , , , |
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| Format: | Journal |
| Published: |
2018
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| Subjects: | |
| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84891773064&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/52697 |
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| Institution: | Chiang Mai University |
| Summary: | Effects of a sandwich metallic gold layer on electrical and optical properties of ITO films were investigated in this study. ITO/metal/ITO multilayer films were deposited on borosilicate glass using ultrasonic spray pyrolysis in air atmosphere for the ITO. The metallic layer of Au was coated via a sputtering process in the thickness range of 5-20 nm. The addition of the metallic layer enhanced conductivity, but reduced the transmittance in the multilayer films. ITO/Au/ITO multilayer films have much lower resistivity than ITO single layer film of the same thickness. The ITO/10nm Au/ITO film had the maximum figure of merit or the best performance of these samples. © 2013 Copyright Taylor and Francis Group, LLC. |
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