Characteristics of a 13.56 Mhz radiofrequency-driven multicusp ion source
The characteristics of a radiofrequency (rf)-driven multicusp ion source are investigated. The ion source is an Nd-Fe-B magnetic multicusp type operated at 13.56 MHz with an internal quartz covered antenna. The source has been diagnosed by an rf-compensated Langmuir probe for uniformity, density and...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
2014
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| Online Access: | http://www.scopus.com/inward/record.url?eid=2-s2.0-0036861411&partnerID=40&md5=5b9e283c5a87d4ff45d701a77047fd9f http://cmuir.cmu.ac.th/handle/6653943832/5305 |
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| Institution: | Chiang Mai University |
| Language: | English |