Text this: Characteristics of a 13.56 Mhz radiofrequency-driven multicusp ion source

 ______    _    _     _____    _    _   __    __  
|      \\ | || | ||  / ____|| | || | || \ \\ / // 
|  --  // | || | || / //---`' | || | ||  \ \/ //  
|  --  \\ | \\_/ || \ \\___   | \\_/ ||   \  //   
|______//  \____//   \_____||  \____//     \//    
`------`    `---`     `----`    `---`       `