Plasma biasing to control the growth conditions of diamond-like carbon

• Main Authors: Anders A., Pasaja N., Lim S.H.N., Petersen T.C., Keast V.J.
• 格式: Article
• 語言: English
• 出版: 2014
• 在線閱讀: http://www.scopus.com/inward/record.url?eid=2-s2.0-33845308546&partnerID=40&md5=13db0fce5d474bee9dc13c4f2c178ae2; http://cmuir.cmu.ac.th/handle/6653943832/5322

It is well known that the structure and properties of diamond-like carbon, and in particular the sp3/sp2 ratio, can be controlled by the energy of the condensing carbon ions or atoms. In many practical cases, the energy of ions arriving at the surface of the growing film is determined by the bias ap...