Diamond-like carbon formed by plasma immersion ion implantation and deposition technique on 304 stainless steel

• Main Authors: C. Pakpum, N. Pasaja, D. Boonyawan, P. Suanpoot, P. Srisantithum, C. Silawatshananai, T. Vilaithong
• 格式: Book Series
• 出版: 2018
• 主題: Materials Science; Physics and Astronomy
• 在線閱讀: https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=24944436410&origin=inward; http://cmuir.cmu.ac.th/jspui/handle/6653943832/62280

Diamond-like carbon (DLC) films were deposited on stainless steel disc substrates by plasma immersion ion implantation and deposition (PIII&D) technique. Ar, CH4 and C2H2 gas were used as the working gases and discharged by radio frequency at 13.56 MHz. During the implantation and deposition pro...