Diamond-like carbon formed by plasma immersion ion implantation and deposition technique on 304 stainless steel
Diamond-like carbon (DLC) films were deposited on stainless steel disc substrates by plasma immersion ion implantation and deposition (PIII&D) technique. Ar, CH4 and C2H2 gas were used as the working gases and discharged by radio frequency at 13.56 MHz. During the implantation and deposition pro...
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Main Authors: | C. Pakpum, N. Pasaja, D. Boonyawan, P. Suanpoot, P. Srisantithum, C. Silawatshananai, T. Vilaithong |
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格式: | Book Series |
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2018
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在線閱讀: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=24944436410&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/62280 |
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機構: | Chiang Mai University |
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