Diamond-like carbon formed by plasma immersion ion implantation and deposition technique on 304 stainless steel
Diamond-like carbon (DLC) films were deposited on stainless steel disc substrates by plasma immersion ion implantation and deposition (PIII&D) technique. Ar, CH4 and C2H2 gas were used as the working gases and discharged by radio frequency at 13.56 MHz. During the implantation and deposition pro...
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| Main Authors: | , , , , , , |
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| Format: | Book Series |
| Published: |
2018
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| Subjects: | |
| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=24944436410&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/62280 |
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| Institution: | Chiang Mai University |