Deep reactive ion etching of alumina titanium carbide using chlorine-based plasma

by C. Pakpum, N. Pussadee
Published 2018

Air bearing surface recessed steep wall via optical proximity correction mask and fluorine-based plasma etching

by C. Pakpum, N. Pussadee
Published 2018

Redeposition-free of silicon etching by CF<inf>4</inf> microwave plasma in a medium vacuum process regime

by C. Pakpum, D. Boonyawan
Published 2020

Diamond-like carbon formed by plasma immersion ion implantation and deposition technique on 304 stainless steel

by C. Pakpum, N. Pasaja, D. Boonyawan, P. Suanpoot, P. Srisantithum, C. Silawatshananai, T. Vilaithong
Published 2018