Deep reactive ion etching of alumina titanium carbide using chlorine-based plasma

由 C. Pakpum, N. Pussadee
出版 2018

Air bearing surface recessed steep wall via optical proximity correction mask and fluorine-based plasma etching

由 C. Pakpum, N. Pussadee
出版 2018

Redeposition-free of silicon etching by CF<inf>4</inf> microwave plasma in a medium vacuum process regime

由 C. Pakpum, D. Boonyawan
出版 2020

Diamond-like carbon formed by plasma immersion ion implantation and deposition technique on 304 stainless steel

由 C. Pakpum, N. Pasaja, D. Boonyawan, P. Suanpoot, P. Srisantithum, C. Silawatshananai, T. Vilaithong
出版 2018