Deep reactive ion etching of alumina titanium carbide using chlorine-based plasma
© 2016 Elsevier B.V. Al2O3-TiC (AlTiC) burnish head is widely used in hard disk drive manufacturing process to smoothen magnetic media surface produced from metal deposition process. Vertical etched wall of air bearing surface burnish head is ideal fabrication target since it provides fly height sta...
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| Main Authors: | , |
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| Format: | Journal |
| Published: |
2018
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| Subjects: | |
| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84971597351&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/55417 |
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| Institution: | Chiang Mai University |