Air bearing surface recessed steep wall via optical proximity correction mask and fluorine-based plasma etching

© 2016 Elsevier B.V. Etched steep wall is very difficult to achieve by fluorine-based Reactive Ion Etching (RIE) process on Air Bearing Surface (ABS) made of alumina titanium carbide (Al2O3-TiC or AlTiC). The ideal wall angle of a fly height target for read/write slider head would be perfectly verti...

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Bibliographic Details
Main Authors: C. Pakpum, N. Pussadee
Format: Journal
Published: 2018
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Online Access:https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84979649714&origin=inward
http://cmuir.cmu.ac.th/jspui/handle/6653943832/55418
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Institution: Chiang Mai University