Air bearing surface recessed steep wall via optical proximity correction mask and fluorine-based plasma etching
© 2016 Elsevier B.V. Etched steep wall is very difficult to achieve by fluorine-based Reactive Ion Etching (RIE) process on Air Bearing Surface (ABS) made of alumina titanium carbide (Al2O3-TiC or AlTiC). The ideal wall angle of a fly height target for read/write slider head would be perfectly verti...
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| Main Authors: | , |
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| Format: | Journal |
| Published: |
2018
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| Subjects: | |
| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84979649714&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/55418 |
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| Institution: | Chiang Mai University |