Air bearing surface recessed steep wall via optical proximity correction mask and fluorine-based plasma etching

• Main Authors: C. Pakpum, N. Pussadee
• Format: Journal
• Published: 2018
• Subjects: Chemistry; Materials Science; Physics and Astronomy
• Online Access: https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84979649714&origin=inward; http://cmuir.cmu.ac.th/jspui/handle/6653943832/55418
• Institution: Chiang Mai University

© 2016 Elsevier B.V. Etched steep wall is very difficult to achieve by fluorine-based Reactive Ion Etching (RIE) process on Air Bearing Surface (ABS) made of alumina titanium carbide (Al2O3-TiC or AlTiC). The ideal wall angle of a fly height target for read/write slider head would be perfectly verti...